Semiconductor's etching process as a use case for Design of Experiments (DoE)

The etching process in semiconductor industry is a good use case to apply a Design of Experiments (DoE) approach. We start with a set of physical quantities as candidates that could be possible influence factors on other interesting quantities which we call responses. We go through the whole DoE workflow and use Cornerstone software as engineering platform for our analyses. The goal is to minimize the manufacturing process time. Content: 0:00 Signation 0:21 Defining the experiment 7:21 Making the (mathematical) design 15:36 Analyzing the data 27:06 Playing with the model 29:30 Contact information