PHI Webinar Series: Auger Multi-Technique - EDS, EBSD, BSE & FIB

The latest in Physical Electronics webinar series is on Auger Multi-technique. Auger Electron Spectroscopy (AES) is a very powerful surface sensitive technique used for determining the composition of micron and nano-scale sized features, as well as for general thin film analysis. Its application has found widespread use in various fields of study such as semiconductors, microelectronics, metallurgy, fracture analysis, corrosion, catalysis, thin film coatings, and failure analysis. While Auger by itself can solve many problems, at times, the combination of other techniques with Auger can provide complementary data useful for more complete (or better) characterization of materials. This webinar will describe PHI's 710 Auger instrument with in-situ EDS, EBSD, BSE and FIB capabilities. Applications of each technique will be shown, demonstrating the usefulness of in-situ complementary analysis on a single UHV instrument.