ARFTG94 B3 - In-Situ Calibration and De-Embedding Test Structure Design OnWafer Characterization

Presented by Marco Cabbia. In this paper, we present an in-situ thru-reflect-line (TRL) calibration and de-embedding kit that sets the reference plane in close proximity to the device under test. This is made possible thanks to the realization of the standards at the metal-3 BEOL level, instead of the common metal-8 solution. This novel calibration kit has been compared to classic TRL, both for parasitics assessment and by direct application on the active device (HBT) measurements.