Webinar Recording: Inside the Chip: Semiconductor Failure Analysis with AFM-in-SEM
Discover how LiteScope AFM-in-SEM technology enhances R&D and failure analysis of semiconductors - harnessing the power of Atomic Force Microscopy integrated directly inside the SEM chamber 🔬 In this webinar, you’ll learn how LiteScope’s correlative workflow (combining SEM, FIB, and AFM) enables true in-situ semiconductor failure analysis. Explore site-specific electrical and topographical characterization of complex structures such as vias, transistors, and doped layers with nanoscale precision. From dopant profiling to conductivity mapping, see real-world examples of how AFM-in-SEM enhances defect localization and reduces turnaround times. What you'll gain: ✅ Advanced semiconductor failure analysis techniques ✅ How to navigate and analyse interconnects, layered structures, and hidden defects ✅ Benefits of integrated AFM-FIB-SEM for non-destructive, in-vacuum workflows ✅ Practical applications for dopant concentration mapping, I/V characterization, and more This webinar is perfect for: 🔬 Semiconductor R&D professionals 🔬 Failure analysis engineers 🔬 Scientist doing research in advanced electronics 💬 Have questions? Contact us: https://www.nenovision.com/contact-us ⚡ Explore more semiconductor use cases: https://www.nenovision.com/applicatio... 🔗 Follow us on LinkedIn: / nenovision ⏱ Timestamps for easy navigation: 0:00 Nenovision Intro 3:01 AFM-in-SEM Technology 9:01 Failure Analysis & Solution 25:11 Use Case 1: Failure analysis of a NAND structure 27:20 Use Case 2: Dopant Concentration Analysis of MOSFET Transistor 39:50 Q&A

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