Introduction to X-ray Photoelectron Spectroscopy (XPS) by Rick Haasch - MRL Webinar Series
X-ray photoelectron spectroscopy (XPS), also known as electron spectroscopy for chemical analysis (ESCA), is a widely used materials characterization technique belonging to the general class of methods referred to as surface analysis. This non-destructive technique provides, to varying degrees, semi-quantitative elemental, chemical-state and electronic structure information from the top 5-10 nm of a material and is sensitive to elements Li and above. XPS has found applications over a vast range of material classes; such as metallic, ceramic, polymeric, and composite; and technologies such as microelectronics, energy conversion and storage, and nanotechnology. Modern spectrometers are now not only capable of achieving high-energy resolution spectroscopy but are also capable of 2-dimensional imaging.

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