MOXTEK VIS Metalens Volume Capability

This talk reviews Moxtek metalenses, which are flat lens similar to Fresnel lens but composed of sub-wavelength phase shifting scatterers. Building metalenses for the visible range imparts challenging nanofabrication requirements. The requisite phase profiles often impart dramatic changes in nanostructure fill fraction, which are challenging to pattern via optical lithography. To manufacture this type of device in volume, Nanoimprint Lithography becomes key due to its ability to replicate extremely tight tolerances independent of the structural arrangement. Moxtek has set up a manufacturing demonstration where we build high aspect ratio pillars, constructed from high refractive index material arranged in various layouts that result in metalenses optimized for green wavelengths. Process development of the metalenses is reviewed using metrology test devices and finished lenses are characterized using a variety of techniques.