Microfluidics by soft lithography - Part 2 - Spin coating and soft bake
Spin coating of SU8 2010. Step 1: 500rpm, 100rpm/s acceleration, 10s. Step 2: 1500rpm, 300rpm/s, 30s. Final film thickness approximately 15µm. Soft bake: 1min at 65°C, 4min at 95°C.
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