Drawing Microscopic Patterns with Electrons
Today we're looking at Electron Beam Lithography using a scanning electron microscope š„° CONSIDER SUBSCRIBING š„° š¬Patreon if that's your jam: Ā Ā /Ā breakingtapsĀ Ā āOr buy me a coffee? https://www.buymeacoffee.com/Breaking... š¢Twitter: Ā Ā /Ā breakingtapsĀ Ā š·Instagram: Ā Ā /Ā breakingtapsĀ Ā š»Discord: Ā Ā /Ā discordĀ Ā ==== More E-Beam Litho! ==== peterbjornx has recently been converting his SEM to run litho patterns. Particularly interesting since it's very DIY (vs the python api for my machine): Ā Ā /Ā 1489776638841737217Ā Ā Ā Ā /Ā 1487015399388598277Ā Ā And of course the infamous Sam Zeloof did a video on the topic years ago š Ā Ā Ā ā¢Ā MakingĀ TinyĀ ThingsĀ withĀ ElectronĀ Microscop...Ā Ā ==== Never Gonna Give You Up :) ==== Never Gonna Give You Up remix by Kingdom Power Music (Ā Ā Ā ā¢Ā RickĀ ASTLEYĀ -Ā NeverĀ GonnaĀ GiveĀ YouĀ UpĀ (REM...Ā Ā ) Kingdom power music Instagram: Ā Ā /Ā kingdompmusicĀ Ā ==== Timeline ==== 0:00 Intro 2:02 Electron Beam Lithography 4:56 Substrate Choice 6:02 PMMA Resist 7:47 How do e-beam resists work? 9:35 Development 10:47 Results! 14:18 Dose Dependence 15:06 Resist Thickness 15:19 Substrate 15:22 Accelerating Voltage 16:03 Proximity Effect 17:06 Emission Current 17:35 SEM vs EBL 19:50 Fast Beam Blanker 21:13 PMMA dosing - Positive vs Negative resist 22:21 Next Steps 22:49 Curiosity Rover Wheel!

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E-Beam Lithography, Part 1

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Introduction to EBL

